Equipment
epitaxial growth
(nano)structure & characterization
devices
Epitaxial growth
2 x 300 mm Crius Cluster (Aixtron AG)
2 x 2" III/V-MOVPE-systems (Aixtron AG)
OXTRON
(Nano)structure & characterization
Transmission electron microscopy
(TEM)Double Cs-corrected TEM JEM 2200FS
TEM JEM 3010
JEOL JIB 4610F, dual beam FIB/SEM
TEM sample preparation
Atomic force microscopy (AFM)
X-ray diffraction
Scanning electron microscopy (SEM)
Photoluminescence (PL)
Devices
processing
