Scanning electron microscopes
Hitachi
- cold field emission gun
- high tension: 5 .. 30 kV
- secondary electron detector
- backscattered electron detector
- energy dispersive X-ray analysis (EDX) (Oxford)
- electron beam induced current (EBIC)
REM JEOL JSM-7500F
- liquid N2-Kryo-transfer system
- gentle-beam-function
