Rhinow, D., Hermanns, C. F., von Saldern, J. C., Marbach, H., Auth, N., Szafranek, B., Preischl, C. (inventors) Verfahren und Vorrichtung zur Maskenreparatur. DE102022202058A1 , publication date: 2023-09-05 https://worldwide.espacenet.com/patent/search?q=pn%3DDE102022202058A1
16
Rhinow D., Budach, M., Emmrich, D. A., Spies, P., Braun, J., Rensing, C., Stelzner, R., Auth, N., Baralia, G.-G., Hermanns, C. F., Laemmle, D., Solowan, H.-M. (inventors) Verfahren und Vorrichtung zum Elektronenstrahl-induzierten Bearbeiten eines Defekts einer Photomaske für die Mikrolithographie. DE102022121129A1, publication date: 2023-08-17 https://worldwide.espacenet.com/patent/search?q=pn%3DDE102022121129A1
Guentner, J., Rhinow, D.; Marbach, H.; Auth, N.; Hoinkis, O. (inventors) Apparatus for Analysing and/or Processing a sample with a Particle Beam And Method. DE102020124307A1; WO2022058424A1, publication date: 2022-03-24 https://worldwide.espacenet.com/patent/search?q=pn%3DWO2022058424A1
Rhinow, D.; Welte, J.; Bauer, M. (inventors) Method and Apparatus for Setting a Side Wall Angle of a Pattern Element of a photolithographic mask. DE102020208185A1; DE102020208185A9; WO2022002931A1, publication date: 2022-01-06 https://worldwide.espacenet.com/patent/search?q=pn%3DWO2022002931A1
Rhinow, D.; Fettig, R.; Bauer, M. (inventors) Verfahren und Vorrichtung zur Untersuchung eines Strahls geladener Teilchen. DE102018210522A1; DE102018210522B4; JP2021530084A; TW202013444A; TWI734999B; US2021110996A1; WO2020002344A1, publication date: 2020-01-02 https://worldwide.espacenet.com/patent/search?q=pn%3DDE102018210522A1
4
Rhinow, D.; Bauer, M.; Hermanns, C. F.; Welte, J. (inventors) Vorrichtung und Verfahren zum Bestimmen einer Prozessauflösung eines Teilchenstrahl-induzierten Bearbeitungsprozesses eines Elements für die Fotolithographie. DE102018221304A1, publication date: 2019-12-24 https://worldwide.espacenet.com/patent/search?q=pn%3DDE102018221304A1
Terfort, A.; Rhinow, D. (inventors) Method for Preparing a Cross-Linked Hydrogel Nanomembrane, the Cross-Linked Hydrogel Nanomembrane, TEM Grid Comprising the Same and Use Therof. EP3619733A1; US2020239642A1; WO2018202837A1, publication date: 2018-11-08 https://worldwide.espacenet.com/patent/search?q=pn%3DWO2018202837A1
1
Terfort, A.; Rhinow, D.; Turchanin, A. (inventors) Functionalized nanomembrane, a method for preparation thereof and their use. CN107249731A; CN107249731B; EP3050620A1; EP3250319A1; US10794908B2; US2018017558A1; WO2016120450A1, publication date: 2016-08-04 https://worldwide.espacenet.com/patent/search?q=pn%3DUS10794908B2
Nr.
Wissenschaftliche Publikationen
45
Hermans, Y., Heil, T., Capelli, R., Szafranek, B., Rhinow,D., Mette, G., Salg, P., Hermanns, C. F., Dey, B., Halipre, D., Trivkovic, D., Delgadillo, P, R., Marschner, T., Halder, S. EUV mask defect inspection for the 3nm technology node. Proc. SPIE 12802, 38th European Mask and Lithography Conference (EMLC 2023) 2023,128020H. https://doi.org/10.1117/12.2678392
44
Lin, K.-Y.; Preischl, C.; Hermanns, C. F.; Rhinow, D.; Solowan, H.-M.; Budach, M.; Marbach, H.; Edinger, K.; Oehrlein, G. S. Electron beam-induced etching of SiO2, Si3N4, and poly-Si assisted by CF4/O2 remote plasma. J. Vac. Sci. Technol. A2023, 41, 013004. https://doi.org/10.1116/6.0002234
43
Lin, K.-Y.; Preischl, C.; Hermanns, C. F.; Rhinow, D.; Solowan, H.-M.; Budach, M.; Edinger, K.; Oehrlein, G. S. SiO2 etching and surface evolution using combined exposure to CF4/O2 remote plasma and electron beam. J. Vac. Sci. Technol. A2022, 40, 063004. https://doi.org/10.1116/6.0002038
42
Riedel, R.; Frese, N.; Yang, F.; Wortmann, M.; Dalpke, R.; Rhinow, D.; Hampp, N.; Gölzhäuser, A. Fusion of purple membranes triggered by immobilization on carbon nanomembranes. Beilstein J. Nanotechnol.2021, 12, 93-101. https://doi.org/10.3762/bjnano.12.8
41
Schneider, H.; Tu, F.; Ahmels, L.; Szafranek, B.; Gries, K.; Rhinow, D.; Vollmar, S.; Krugmann, A.; Schoenberger, R.; Pauls, W.; Verch, A.; Capelli, R.; Di Vincenzo, A.; Kersteen, G.; Marbach, H.; Waldow, M. High-end photomask repairs for 5 nm technology and beyond. Proc. SPIE Photomask Technology2020, 1151808. [Artikel]
40
Rhinow, D.; Hampp, N. Electron beam-induced electrostatic charging causes spectral changes of an electrochromic insulating material. Appl. Phys. Lett.2020, 117, 083701. https://doi.org/10.1063/5.0022695
39
Scherr, J.; Tang, Z.; Küllmer, M.; Balser, S.;Scholz, A. S.; Winter, A.; Parey, K.; Rittner, A.; Grininger, M.; Zickermann, V.; Rhinow, D.; Terfort, A.; Turchanin, A. Smart Molecular Nanosheets for Advanced Preparation of Biological Samples in Electron Cryo-Microscopy. ACS Nano2020, 14, 9972-9978. https://doi.org/10.1021/acsnano.0c03052
38
Dasbach, M.; Pyschik, M.; Lehmann, V.; Parey, K.; Rhinow, D.; Rhinow, D.; Reinhardt, H. M.; Hampp, N. A. Assembling Carbon Nanotube Architectures. ACS Nano, 2020, 14, 8181-8190. https://doi.org/10.1021/acsnano.0c01606
37
Reinhardt, H. M.; Maier, P.; Kim, H.-C.; Rhinow, D.; Hampp, N. Nanostructured Transparent Conductive Electrodes for Applications in Harsh Environments Fabricated via Nanosecond Laser-Induced Periodic Surface Structures (LIPSS) in Indium-Tin Oxide Films on Glass. Adv. Mat. Interf.2019, 6, 1900401. https://doi.org/10.1002/admi.201900401
36
Scherr, J.; Neuhaus, N.; Parey, K.; Klusch, N.; Murphy, B. M.; Zickermann, V.; Kühlbrandt, W.; Terfort, A.; Rhinow, D. Noncovalent functionalization of carbon substrates with hydrogels improves structural analysis of vitrified proteins by electron cryo-microscopy. ACS Nano2019, 13, 7185-7190. https://doi.org/10.1021/acsnano.9b02651
35
Reich, S.; Kaiser, P.; Mafi, M.; Schmalz, H.; Rhinow, D., Freitag, R.; Greiner, A. High-temperature spray-dried polymer/bacteria microparticles for electrospinning of composite nonwovens. Macromol. Biosci.2019, 19, 1800356. https://doi.org/10.1002/mabi.201800356
Scherr, J.; Parey, K.; Klusch, N.; Murphy, B. J.; Balser, S.; Neuhaus, A.; Zickermann, V.; Kühlbrandt, W.; Terfort, A.; Rhinow, D. Self-perforated hydrogel nanomembranes facilitate structural analysis of proteins by electron cryo-microscopy. ACS Nano2017, 11, 6467-6473. https://doi.org/10.1021/acsnano.7b03099
32
Nürnberger, P.; Reinhardt, H.; Rhinow, D.; Riedel, R.; Werner, S.; Hampp, N. A. Controlled growth of periodically aligned copper-silicide nanocrystals on silicon directed by laser-induced periodic surface structures (LIPSS). Appl. Surf. Sci.2017, 420, 70-76. https://doi.org/10.1016/j.apsusc.2017.05.005
31
Wilkes, M.; Madej, M. G.; Kreuter, L.; Rhinow, D.; Heinz, V.; Sanctis, S. Ruppel, S.; Richter, R. M.; Joos, F.; Grieben, M.; Pike, A. C. W.; Huiskonen, J.; Carpenter, E. P.; Kühlbrandt, W.; Ziegler, C. Ca2+ selectivity switching in the Polycystin-2 TRP channel. Nat. Struct. Mol. Biol.2017, 24, 123-130. https://doi.org/10.1038/nsmb.3357
Kraushaar, T.; Brückner, S.; Veelders, M.; Rhinow, D.; Birke, R.; Pagenstecher, A.; Mösch, H.-U.; Essen, L.-O. Interactions by the fungal Flo11 adhesin depends on a fibronectin type III-like adhesin domain girdled by aromatic bands. Structure2015, 23, 1-13. https://doi.org/10.1016/j.str.2015.03.021
28
Rhinow, D. Nanomembranes for biological transmission electron microscopy. in Nanobiotechnology in Energy, Environment, and Electronics (C. Nicolini ed.), CRC press, 2015 p. 137-153.
27
Fischer, M.; Rhinow, D.; Zhu, Z.; Mills, D. J.; Zhao, Z. K.; Vonck, J.; Grininger, M. Cryo-EM structure of fatty acid synthase (FAS) from Rhodosporidium toruloides provides insights into its novel splitting of the multi-functional polypeptide chains and its evolutionary development. Protein Sci.2015, 24, 987-995. https://doi.org/10.1002/pro.2678
26
Walter, A.; Steltenkamp, S.; Schmitz, S.; Holik, P.; Pakanavicius, E.; Sachser, R.; Huth, M.; Rhinow, D.; Kühlbrandt, W. Towards an optimum design for electrostatic phase plates. Ultramicroscopy2015, 153, 22-31. https://doi.org/10.1016/j.ultramic.2015.01.005
25
Busch, A. P.; Rhinow, D.; Yang, F.; Reinhardt, H.; Geyer, A.; Gölzhäuser, A.; Hampp, N. Site-selective biomineralization of native biological membranes. J. Mater. Chem. B2014, 2, 6924-6930. https://doi.org/10.1039/C4TB00468J
24
Köster, S.; van Pee, K.; Hudel, M.; Leustik, M.; Rhinow, D.; Chakraborty, T.; Kühlbrandt, W. Crystal structure of listeriolysin O reveals molecular details for oligomerization and pore formation. Nat. Commun.2014, 5, 3690. https://doi.org/10.1038/ncomms4690
23
Imhof, M.; Rhinow, D.; Hampp, N. Two-photon polarization data storage in bacteriorhodopsin films and its potential use in security applications. App. Phys. Lett.2014, 104, 081921. https://doi.org/10.1063/1.4867164
22
Imhof, M.; Rhinow, D.; Linne, U.; Hampp, N. Two-photon-induced selective decarboxylation of aspartic acids D85 and D212 in bacteriorhodopsin. J. Phys. Chem. Lett.2012, 3, 2991-2994. https://doi.org/10.1021/jz301292n
21
Imhof, M.; Pudewills, J.; Rhinow, D.; Chizhik, I.; Hampp, N. Stability of purple membranes from Halobacterium salinarum towards surfactants – Inkjet printing of a retinal protein. J. Phys. Chem. B 2012, 116, 9727-9731. https://doi.org/10.1021/jp3057459
20
Kämpken, B.; Wulf, V.; Auner, N.; Winhold, M.; Huth, M.; Rhinow, D.; Terfort, A. Directed deposition of silicon nanowires using neopentasilane as precursor and gold as catalyst. Beilstein J. Nanotechnol.2012, 3, 535-545. https://doi.org/10.3762/bjnano.3.62
19
Rhinow, D.; Weber, N.-E.; Turchanin, A. Atmospheric pressure, temperature-induced conversion of organic monolayers into nanocrystalline graphene. J. Phys. Chem. C2012, 116, 12295-12303. https://doi.org/10.1021/jp301877p
18
Rhinow, D.; Imhof, M.; Chizhik, I.; Baumann, R.-P.; Hampp, N. Structural changes in bacteriorhodopsin caused by two-photon-induced photobleaching. J. Phys. Chem. B2012, 116, 7555-7562. https://doi.org/10.1021/jp2112846
17
Rhinow, D.; Hampp, N. Patterned self-assembled monolayers of alkanethiols on copper nanomembranes by submerged laser ablation. Appl. Phys. A2012, 112, 755-759. https://doi.org/10.1007/s00339-012-6930-6
16
Walter, A.; Muzik, H.; Vieker, H.; Turchanin, A.; Beyer, A.; Gölzhäuser, A.; Lacher, M.; Steltenkamp, S.; Schmitz, S.; Holik, P.; Kühlbrandt, W.; Rhinow, D. Practical aspects of Boersch phase contrast electron microscopy of biological specimens. Ultramicroscopy2012, 116, 62-72. https://doi.org/10.1016/j.ultramic.2012.03.009
15
Rhinow, D.; Weber, N.-E.; Turchanin, A.; Gölzhäuser, A.; Kühlbrandt, W. Single-walled carbon nanotubes and nanocrystalline graphene reduce beam-induced movements in high-resolution electron cryo-microscopy of ice-embedded biological samples. Appl. Phys. Lett.2011, 99, 133701. https://doi.org/10.1063/1.3645010
14
Barton, B.; Rhinow, D.; Walter, A.; Schröder, R.; Benner, G.; Majorovits, E.; Matijevic, M.; Niebel, H.; Müller, H.; Haider, M.; Lacher, M.; Schmitz, S.; Holik, P.; Kühlbrandt, W. In-focus electron microscopy of frozen-hydrated biological samples with a Boersch phase plate. Ultramicroscopy 2011, 111, 1696-1705. https://doi.org/10.1016/j.ultramic.2011.09.007
13
Rhinow, D.; Büenfeld, M.; Weber, N.-E.; Beyer, A.; Gölzhäuser, A.,; Kühlbrandt, W.; Hampp, N.; Turchanin, A. Energy-filtered transmission electron microscopy of biological samples on highly transparent carbon nanomembranes. Ultramicroscopy2011, 111, 342-349. https://doi.org/10.1016/j.ultramic.2011.01.028
12
Rhinow, D.; Chizhik, I.; Baumann, R.-P.; Noll, F.; Hampp N. Crystallinity of purple membranes comprising the chloride-pumping bacteriorhodopsin variant D85T and its modulation by pH and salinity. J. Phys. Chem. B2010, 114, 15424-15428. https://doi.org/10.1021/jp108502p
11
Collins, A. M.; Kaus, N. H. M; Speranza, F.; Briscoe, W. H.; Rhinow, D.; Hampp, N.; Mann, S. Assembly of poly(methacrylate)/purple membrane lamellar composite films by intercalation and in situ polymerization. J. Mater. Chem.2010, 20, 937-941. https://doi.org/10.1039/C0JM01358G
10
Schranz, M.; Baumann, R.-P.; Rhinow, D.; Hampp, N. Dynamics of bacteriorhodopsin in solid-supported purple membranes studied with tapping-mode atomic force microscopy. J. Phys. Chem. B2010, 114, 9047-9053. https://doi.org/10.1021/jp102377c
9
Rhinow, D.; Vonck, J.; Schranz, M.; Beyer, A.; Gölzhäuser, A.; Hampp, N. Ultrathin conductive carbon nanomembranes as support films for structural analysis of biological specimens. Phys. Chem. Chem. Phys.2010, 12, 4345-4350. https://doi.org/10.1039/B923756A
8
Rhinow, D.; Hampp, N. Curvature of purple membranes comprising permanently wedge-shaped bacteriorhodopsin molecules is regulated by lipid content. J. Phys. Chem. B2010, 114, 549-556. https://doi.org/10.1021/jp908408d
7
Collins, A.; Rhinow, D., Hampp, N.; Mann, S. Structure and properties of silicified purple membrane thin films. Biomacromolecules2009, 10, 2767-2771. https://doi.org/10.1021/bm900625u
6
Rhinow, D.; Kühlbrandt, W. Electron cryo-microscopy of biological specimens on conductive titanium–silicon metal glass films. Ultramicroscopy2008, 108, 698-705. https://doi.org/10.1016/j.ultramic.2007.11.005
5
Rhinow, D.; Hampp, N. A. Light- and pH-dependent conformational changes in protein structure induce strong bending of purple membranes – active membranes studied by cryo-SEM. J. Phys. Chem. B2008, 112, 13116-13120. https://doi.org/10.1021/jp803510t
4
Neebe, M.; Rhinow, D., Schromczyk, N.; Hampp, N. A. Thermochromism of bacteriorhodopsin and its pH dependence. J. Phys. Chem. B2008, 112, 6946-6951. https://doi.org/10.1021/jp7111389
3
Rhinow, D.; Hampp, N. A. Sugar-induced blue membrane: Release of divalent cations during phase transition of purple membranes observed in sugar-derived glasses. J. Phys. Chem. B2007, 112, 4613-4619. https://doi.org/10.1021/jp710694s
