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Project A1: Metal Organic Vapour Phase Epitaxy of Semiconductor Heterostructures and Interfaces

Principle Investigator: Dr. Wolfgang Stolz (Marburg, WZMW)



This project aims at the deposition of defined interfaces in III/V-compound semiconductor heter-ostructures by applying the developed low-temperature metal organic vapour phase epitaxy (MOVPE). As model systems for the different interface formation processes the lattice-matched, polar/nonpolar GaP/(001) Si- and GaAs/(001) Ge-interface, the strained (GaIn)As/(GaIn)P-heterostructures as well as interface configurations in metastable, multinary (GaIn)(NAsSb)-based heterostructures with type-II-band alignment are selected. In close cooperation with the partner projects the correlation of the MOVPE growth conditions with the structural as well as optoelectronic characteristics of these interface-dominated semiconductor heterostructures will be clarified and quantified on an atomic level as well as optimized for specific properties and applications. In this project the MOVPE growth studies will be complemented by in-situ reflection anisotropy spectroscopy (RAS), highly-selective chemical etching schemes to uncover internal interface structures and investigation of the interface morphology by subsequent atomic force microscopy (AFM) as well as high-resolution X-ray diffraction (HR-XRD) analysis and modelling.

Project-Related Publications

  1. A. Beyer, A. Stegmüller, J.O. Oelerich, K. Werner, G. Mette, W. Stolz, S.D. Baranovskii, R. Tonner, K. Volz Pyramidal structure formation at the interface between III/V semiconductors and silicon Chem. Mater. 28, 3265 (2016).
  2. C. Fuchs, A. Beyer, K. Volz, W. Stolz MOVPE growth of (GaIn)As/Ga(AsSb)/(GaIn)As-type-II heterostructures on GaAs-substrate for near-infrared laser applications J. Cryst. Growth 464, 201 (2017).
  3. H. Döscher, P. Hens, A. Beyer, L. Tapfer, K. Volz, W. Stolz GaP-interlayer formation on epitaxial GaAs (001) surfaces in MOVPE ambient J. Cryst. Growth 464, 2 (2017).

Last modified: 16.03.2018 · armbrusn

Philipps-Universität Marburg

Sonderforschungsbereich 1083, Philipps-Universität Marburg, Renthof 5, 35032 Marburg, Germany
Tel. +49 6421 28-24223, Fax +49 6421 28-24218, eMail:

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