Epitaxy

Epitaxy is the crystalline deposition of thin films on crystalline substrates. We apply the metal organic vapour phase epitaxy (MOVPE) to realize multinary III/V-semiconductor alloys and heterostructures with precise controle of chemical composition as well as of individual thicknesses and of interfaces in the sub-nanometer scale. In different MOVPE-growth apparatuses ranging from small-scale research reactors up to multiwafer production reactor systems, multinary III/V-compounds containing various group III- (B, Al, Ga, In) and group-V-elements (N, P, As, Sb, Bi) can be deposited on wafer diameters up to industry-relevant 300mm Si-substrates.