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Novel metal-organic precursors and their decomposition

In cooperation with synthesis groups in the department of chemistry (groups of C. von Hänisch and J. Sundermeyer) we are studying the application of designed, novel metal organic source molecules of group-III- as well as group-V-elements in the MOVPE growth process. The long term aim of these investigations - also in cooperation with chemical industry partners - is the realization of a safe, environmentally friendly and efficient MOVPE growth technique for complex multinary III/V-compounds and their respective heterostructures. In order to understand the decomposition characteristics of these novel precursors, which is a prerequisite for the defect-free crystalline deposition of the intended semiconductor layers, detailed in-situ gas phase chemistry analysis applying sophisticated mass spectrometry techniques is performed.