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Plasma-FIB-SEM Helios 5 Hydra CX

Configuration

• Multi-ion plasma-source (Xe, Ar, N, O)
• Multichem gas-injection-system (W, Pt, C and Mix)
• Cryo-Stage (exchangeable)
• Clean Connect inert gas and vacuum transfer shuttle
• Stage bias and beam deceleration unto 4000 V
• Charge neutralization (Flood gun)
• High-current processing (60 nA until 200 nA) with shutter
• Auto-Slice and View (ASV) 3D tomography
• Oxygen plasma cleaner
• Easylift rotatable NanoManipulator (Compucentric)
• Nav-Cam Navigation Camera

Detectors

• ETD (Everhart-Thornley Detector): SE / BSE / SI
• ICE (Ion Conversion and Electron Detector): SE / BSE / SI
• TLD (Through Lens Detector): SE / BSE /SI
• ICD (In Column Detector): BSE / SE
• ABS/CBS (Directional Backscattered Detector): BSE
• STEM (Annular STEM): TE
• Tof-SIMS (Time-of-Flight Secondary Ion Mass Spectrometer)
• EDX Detektor 100 mm^2

Accessories

• Large sample holder for multiple specimens
• Rocking polish holder
• Pre-tilted shuttles for FIB Lift-out (0°, 52°, 45°)
• Cryo-shuttles