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Scanning Transmission Electron Microscope JEOL NEOARM JEM-ARM200F (ATEMMA)

Specifications

• Acceleration voltage: 30 kV, 60 kV, (80 kV) & 200 kV
• Cold Field Emission Gun (CFEG): dE < 0.3 eV, 2.5 nA @ 0,7 nm, 1.0 nA @ 0.2 nm
• Mu-Metal Screening
• Lorentz mode (field-free)
• TEM mode
• Cs corrected STEM mode (ASCOR: until 5th order), resolution < 0.6 Å
• High-Speed Scan Coils: t < 83 ns, flyback < 50 µs (400 nm x 400 nm)
• Tilt-Scan system
• Nanobeam Diffraction mode
• CEOS CEFID-Energy filter: EFTEM, EELS

Detectors and Cameras

• BF, ADF detectors
• SAAF segmented detector (iDPC)
• SE/BSE detectors
• Faraday Cage (0.5 pA up to 220 nA)
• 2x EDX detectors  (windowless, 100 mm^2)
• Dectris Arina: 192 x 192 pixel (100 x 100 µm^2 pixel size) single electron detector; frame rate: up to 120.000 Hz; count rate: 10^8 e/px/s
• Dectris Ela: 1028 x 512 pixel (75 x 75 µm^2 pixel size); frame rate: 2.250 Hz (16 bit), 4.500 Hz (8 bit); count rate: 10^7 e/px/s
• TVIPS TemCam  XF416 (full frame: 4k x 4k pixels, 48 fps)

TEM Holders

• Single-tilt-analytics holder
• Double-tilt-analytics holder
• Tomography holder
• Double-tilt + Inert gas transfer + cryo holder (Mel-Build)